Nanolithography and patterning techniques in microelectronics / Project Report

Dades bibliogràfiques
Autor principal: Bucknall,David,G (ed.)
Altres autors: Bucknall, David G.
Format: Printed Book
Idioma:English
Publicat: Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, c2005.
Matèries:
Nanolithography
Accés en línia:http://www.loc.gov/catdir/toc/fy0607/2006365086.html
http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html
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