Cargando...
Nanolithography and patterning techniques in microelectronics / Project Report
| Autor Principal: | |
|---|---|
| Outros autores: | |
| Formato: | Printed Book |
| Idioma: | English |
| Publicado: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
c2005.
|
| Subjects: | |
| Acceso en liña: | http://www.loc.gov/catdir/toc/fy0607/2006365086.html http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html |
| Descrición Física: | xiv, 409 p. : ill. ; 24 cm. |
|---|---|
| ISBN: | 1855739313 (Woodhead) 0849334470 (CRC) 1845690907 (ebook) 9781855739314 |