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Nanolithography and patterning techniques in microelectronics / Project Report
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| Format: | Printed Book |
| Language: | English |
| Published: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
c2005.
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| Online Access: | http://www.loc.gov/catdir/toc/fy0607/2006365086.html http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html |
| Physical Description: | xiv, 409 p. : ill. ; 24 cm. |
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| ISBN: | 1855739313 (Woodhead) 0849334470 (CRC) 1845690907 (ebook) 9781855739314 |