Bucknall,David,G, & Bucknall, D. G. (2005). Nanolithography and patterning techniques in microelectronics: Project Report. Woodhead Pub. ; CRC Press.
Citación estilo ChicagoBucknall,David,G, y David G. Bucknall. Nanolithography and Patterning Techniques in Microelectronics: Project Report. Cambridge : Boca Raton, FL: Woodhead Pub. ; CRC Press, 2005.
Cita MLABucknall,David,G, y David G. Bucknall. Nanolithography and Patterning Techniques in Microelectronics: Project Report. Woodhead Pub. ; CRC Press, 2005.
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