Bucknall,David,G, & Bucknall, D. G. (2005). Nanolithography and patterning techniques in microelectronics: Project Report. Woodhead Pub. ; CRC Press.
Chicago Edition CitationBucknall,David,G, and David G. Bucknall. Nanolithography and Patterning Techniques in Microelectronics: Project Report. Cambridge : Boca Raton, FL: Woodhead Pub. ; CRC Press, 2005.
MLA Edition CitationBucknall,David,G, and David G. Bucknall. Nanolithography and Patterning Techniques in Microelectronics: Project Report. Woodhead Pub. ; CRC Press, 2005.
Warning: These citations may not always be 100% accurate.