Lanean...
Principles and applications of NanoMEMS physics /
| Egile nagusia: | |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
Dordrecht, The Netherlands :
Springer,
c2005.
|
| Saila: | Microsystems (Series) ;
v. 15. |
| Gaiak: | |
| Sarrera elektronikoa: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |
| Deskribapen fisikoa: | xv, 254 p. : ill. ; 25 cm. |
|---|---|
| ISBN: | 1402032382 |