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Principles and applications of NanoMEMS physics /
| Autore principale: | |
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| Natura: | Printed Book |
| Lingua: | English |
| Pubblicazione: |
Dordrecht, The Netherlands :
Springer,
c2005.
|
| Serie: | Microsystems (Series) ;
v. 15. |
| Soggetti: | |
| Accesso online: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |
| Descrizione fisica: | xv, 254 p. : ill. ; 25 cm. |
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| ISBN: | 1402032382 |