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Comparison of thin film transistor and SOI technologies : symposium held February 1984 in Albuquerque, New Mexico, U.S.A. /

Bibliographic Details
Other Authors: Lam, H. W., Thompson, M. J.
Language:English
Published: New York : North Holland, c1984.
Series:Materials Research Society Symposia
Subjects:
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245 0 0 |a Comparison of thin film transistor and SOI technologies :  |b symposium held February 1984 in Albuquerque, New Mexico, U.S.A. /  |c editors, H.W. Lam and M.J. Thompson. 
300 |a xv, 321 p. :  |b ill. ;  |c 24 cm. 
490 |a Materials Research Society Symposia  
653 |a .Integrated circuits--Very large scale integration-Congresses.2.Thin film devices--Congresses.3.Silicon--Congresses. 
700 1 |a Lam, H. W.  |9 3042 
700 1 |a Thompson, M. J.  |9 3043 
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260 |a New York :  |b North Holland,  |c c1984. 
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