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  1. 1
    MEMS and nanotechnology for gas sensors /
    by Roy, Sunipa, Sarkar, Chandan Kumar
    Published 2016
    Printed Book
  2. 2
    Micro and nanomanufacturing /
    by Jackson, Mark J.
    Published 2007
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    Printed Book
  3. 3
    Nanomanufacturing handbook /
    Published 2007
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    Get full text
    Printed Book
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