APA Edition Citation

Suzuki, K. (2007). Microlithography: Science and technology (2.).

Chicago Edition Citation

Suzuki, Kazuaki. Microlithography: Science and Technology. 2. CRC Press, Boca Raton, 2007.

MLA Edition Citation

Suzuki, Kazuaki. Microlithography: Science and Technology. 2. 2007.

Warning: These citations may not always be 100% accurate.