Micromachines as tools for nanotechnology

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Detalhes bibliográficos
Autor principal: Fujita, H
Formato: Printed Book
Publicado em: Springer (India) Pvt Ltd., New Delhi 2004
Assuntos:
Microelectromechanical systems
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Micromachines as tools for nanotechnology
Por Fujita, H.
Publicado em 2004
Printed Book
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Micromachines as tools for nanotechnology /
Publicado em 2003
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Micromachines as Tools for Nanotechnology
Por Fujita, H.
Publicado em 2003
Printed Book
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