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Fundamentals of microfabrication
| Main Author: | |
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| Format: | Printed Book |
| Published: |
CRC Press, London
1997
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| Subjects: |
| LEADER | 00556nam a2200193 4500 | ||
|---|---|---|---|
| 020 | |a 9780849394515 | ||
| 082 | |a R 621.38152 MAD-F | ||
| 100 | |a Madou, Marc | ||
| 245 | |a Fundamentals of microfabrication | ||
| 250 | |||
| 260 | |a CRC Press, London |c 1997 | ||
| 300 | |a 589 | ||
| 490 | |||
| 500 | |||
| 590 | |a VMV | ||
| 650 | |a Semiconductor devices; Electronics engineering; Applied physics | ||
| 942 | |c BK | ||
| 999 | |c 84074 |d 84074 | ||
| 952 | |0 0 |1 0 |4 0 |6 R_621_381520000000000_MADF |7 0 |9 97542 |a PHY |b PHY |l 0 |o R 621.38152 MAD-F |p PHY05732 |r 2019-09-24 |w 2019-09-24 |y BK | ||