APA Edition Citation

Campbell, S. A. (1996). Science and engineering of microelectronic fabrication.

Chicago Edition Citation

Campbell, Stephen A. Science and Engineering of Microelectronic Fabrication. Oxford University Press, New York, 1996.

MLA Edition Citation

Campbell, Stephen A. Science and Engineering of Microelectronic Fabrication. 1996.

Warning: These citations may not always be 100% accurate.