Lanean...
Dry etching for microelectronics
| Egile nagusia: | Powell, Ronald A, Ed |
|---|---|
| Formatua: | Printed Book |
| Argitaratua: |
North-Holland Physics Publishing Co., Amsterdam
1984
|
| Gaiak: |
Antzeko izenburuak
-
Etching of crystals : theory, experiment, and application /
nork: Sangwal, Keshra
Argitaratua: (1987) -
Dry etching for microelectronics/
nork: Powell Ronald A
Argitaratua: (1984) -
Plasma processes for semiconductor fabrication
nork: Hitchon, W. Nicholas G.
Argitaratua: (1999) -
Selected papers on resolution enhancement techniques in optical lithography-Bellingham
nork: Schellenberg, F.M. [ed.]
Argitaratua: (2004) -
Microelectronics
nork: Whitaker, Jerry C.
Argitaratua: (2006)