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Dry etching for microelectronics
| 1. autor: | |
|---|---|
| Format: | Printed Book |
| Wydane: |
North-Holland Physics Publishing Co., Amsterdam
1984
|
| Hasła przedmiotowe: |
| LEADER | 00535nam a2200193 4500 | ||
|---|---|---|---|
| 020 | |||
| 082 | |a 621.38173 POW-D | ||
| 100 | |a Powell, Ronald A, Ed. | ||
| 245 | |a Dry etching for microelectronics | ||
| 250 | |||
| 260 | |a North-Holland Physics Publishing Co., Amsterdam |c 1984 | ||
| 300 | |a 299 | ||
| 490 | |||
| 500 | |||
| 590 | |a Bejoy | ||
| 650 | |a Semiconductors--Etching | ||
| 942 | |c BK | ||
| 999 | |c 82626 |d 82626 | ||
| 952 | |0 0 |1 0 |4 0 |6 621_381730000000000_POWD |7 0 |9 96094 |a PHY |b PHY |l 0 |o 621.38173 POW-D |p PHY04285 |r 2019-09-24 |w 2019-09-24 |y BK | ||