|
|
|
|
| LEADER |
00844cam a22001934a 4500 |
| 999 |
|
|
|c 278448
|d 278448
|
| 020 |
|
|
|a 0824787838 (alk. paper)
|
| 082 |
0 |
0 |
|a 621.38152
|
| 245 |
0 |
0 |
|a Handbook of semiconductor manufacturing technology /
|c edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige.
|
| 260 |
|
|
|a New York :
|b Marcel Dekker,
|c c2000.
|
| 300 |
|
|
|a xiv, 1157 p. :
|b ill. ;
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Semiconductors
|v Handbooks, manuals, etc.
|
| 650 |
|
0 |
|a Semiconductor industry
|v Handbooks, manuals, etc.
|
| 700 |
1 |
|
|a Nishi, Yoshio,
|
| 700 |
1 |
|
|a Doering, Robert,
|
| 856 |
4 |
2 |
|u http://www.loc.gov/catdir/enhancements/fy0647/00055564-d.html
|
| 942 |
|
|
|c BK
|
| 952 |
|
|
|0 0
|1 0
|4 0
|6 621_381520000000000_NIS_H
|7 0
|9 296824
|a DOP
|b DOP
|d 2020-03-12
|l 0
|o 621.38152 NIS/H
|p DOP891
|r 2020-03-12
|w 2020-03-12
|y BK
|