Handbook of semiconductor manufacturing technology /

Bibliographic Details
Other Authors: Nishi, Yoshio, Doering, Robert
Format: Printed Book
Published: New York : Marcel Dekker, c2000.
Subjects:
Semiconductors > Handbooks, manuals, etc.
Semiconductor industry > Handbooks, manuals, etc.
Online Access:http://www.loc.gov/catdir/enhancements/fy0647/00055564-d.html
Description
Physical Description:xiv, 1157 p. : ill. ;
Bibliography:Includes bibliographical references and index.
ISBN:0824787838 (alk. paper)

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