Nishi, Y., & Doering, R. (2000). Handbook of semiconductor manufacturing technology. Marcel Dekker.
Chicago Edition CitationNishi, Yoshio, i Robert Doering. Handbook of Semiconductor Manufacturing Technology. New York: Marcel Dekker, 2000.
Cita MLANishi, Yoshio, i Robert Doering. Handbook of Semiconductor Manufacturing Technology. Marcel Dekker, 2000.
Atenció: Aquestes cites poden no estar 100% correctes.