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| LEADER |
00681cam a22001934a 4500 |
| 999 |
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|c 278200
|d 278200
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| 020 |
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|a 9783540745587 (hardcover : alk. paper)
|
| 082 |
0 |
0 |
|a 621.3815
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| 245 |
0 |
0 |
|a Into the nano era /
|c Howard Huff, editor.
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| 260 |
|
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|a Berlin :
|b Springer,
|c c2009.
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| 300 |
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|a xxviii, 343 p. :
|b ill. ;
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| 490 |
0 |
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|a Springer series in materials science ;
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| 504 |
|
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|a Includes bibliographical references and index.
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| 650 |
|
0 |
|a Integrated circuits
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| 650 |
|
0 |
|a Silicon
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| 650 |
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0 |
|a Semiconductors
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| 700 |
1 |
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|a Huff, Howard R.
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| 942 |
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|c BK
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| 952 |
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|a DOP
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|d 2020-03-11
|l 0
|o 621.3815 HUF/I
|p DOP2254
|r 2020-03-11
|w 2020-03-11
|y BK
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