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| LEADER |
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|a 9781420045680
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| 082 |
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4 |
|a 621.381
|
| 100 |
1 |
|
|a Liu, Ai-Qun.
|
| 245 |
1 |
0 |
|a Photonic MEMS devices :
|b design, fabrication and control /
|c Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.].
|
| 260 |
|
|
|a Boca Raton, FL :
|b CRC Press,
|c c2009.
|
| 300 |
|
|
|a 483 p. :
|b ill. ;
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems.
|
| 650 |
|
0 |
|a Photonics.
|
| 856 |
4 |
2 |
|u http://www.loc.gov/catdir/enhancements/fy0903/2008301219-d.html
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