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Photonic MEMS devices : design, fabrication and control /
| Autor principal: | |
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| Format: | Printed Book |
| Publicat: |
Boca Raton, FL :
CRC Press,
c2009.
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| Matèries: | |
| Accés en línia: | http://www.loc.gov/catdir/enhancements/fy0903/2008301219-d.html |
| Descripció física: | 483 p. : ill. ; |
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| Bibliografia: | Includes bibliographical references and index. |
| ISBN: | 9781420045680 |