Hsu, T. (2008). MEMS and microsystems: Design, manufacture, and nanoscale engineering (2nd ed.). John Wiley.
Chicago Edition CitationHsu, Tai-Ran. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering. 2nd ed. Hoboken, N.J.: John Wiley, 2008.
MLA Edition CitationHsu, Tai-Ran. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering. 2nd ed. John Wiley, 2008.
Warning: These citations may not always be 100% accurate.