Tsuchiya, T., & Tabata, O. (2008). Reliability of MEMS. Wiley-VCH.
Chicago Edition CitationTsuchiya, Toshiyuki, and Osamu Tabata. Reliability of MEMS. Weinheim: Wiley-VCH, 2008.
MLA Edition CitationTsuchiya, Toshiyuki, and Osamu Tabata. Reliability of MEMS. Wiley-VCH, 2008.
Warning: These citations may not always be 100% accurate.