Microlithography : science and technology /

Detalhes bibliográficos
Outros Autores: Sheats, James R., Smith, Bruce W.
Formato: Printed Book
Publicado em: New York : Marcel Dekker, c1998.
Assuntos:
Microlithography
Integrated circuits
Metal oxide semiconductors, Complementary
Manufacturing processes.
Acesso em linha:http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Internet

http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

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