Microlithography : science and technology /

Bibliografische gegevens
Andere auteurs: Sheats, James R., Smith, Bruce W.
Formaat: Printed Book
Gepubliceerd in: New York : Marcel Dekker, c1998.
Onderwerpen:
Microlithography
Integrated circuits
Metal oxide semiconductors, Complementary
Manufacturing processes.
Online toegang:http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Internet

http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

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