Microlithography : science and technology /

Detalles Bibliográficos
Outros autores: Sheats, James R., Smith, Bruce W.
Formato: Printed Book
Publicado: New York : Marcel Dekker, c1998.
Subjects:
Microlithography
Integrated circuits
Metal oxide semiconductors, Complementary
Manufacturing processes.
Acceso en liña:http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Internet

http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Títulos similares