Microlithography : science and technology /

Sonraí Bibleagrafaíochta
Údair Eile: Sheats, James R., Smith, Bruce W.
Formáid: Printed Book
Foilsithe: New York : Marcel Dekker, c1998.
Ábhair:
Microlithography
Integrated circuits
Metal oxide semiconductors, Complementary
Manufacturing processes.
Rochtain Ar Líne:http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Idirlíon

http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Míreanna Comhchosúla