Microlithography : science and technology /

Bibliografiset tiedot
Muut tekijät: Sheats, James R., Smith, Bruce W.
Aineistotyyppi: Printed Book
Julkaistu: New York : Marcel Dekker, c1998.
Aiheet:
Microlithography
Integrated circuits
Metal oxide semiconductors, Complementary
Manufacturing processes.
Linkit:http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Internet

http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Samankaltaisia teoksia