Microlithography : science and technology /

Xehetasun bibliografikoak
Beste egile batzuk: Sheats, James R., Smith, Bruce W.
Formatua: Printed Book
Argitaratua: New York : Marcel Dekker, c1998.
Gaiak:
Microlithography
Integrated circuits
Metal oxide semiconductors, Complementary
Manufacturing processes.
Sarrera elektronikoa:http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Internet

http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

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