Microlithography : science and technology /

Bibliographic Details
Other Authors: Sheats, James R., Smith, Bruce W.
Format: Printed Book
Published: New York : Marcel Dekker, c1998.
Subjects:
Microlithography
Integrated circuits
Metal oxide semiconductors, Complementary
Manufacturing processes.
Online Access:http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

Internet

http://www.loc.gov/catdir/enhancements/fy0647/98016713-d.html

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