APA Edition Citation

Sheats, J. R., & Smith, B. W. (1998). Microlithography: Science and technology. Marcel Dekker.

Chicago Edition Citation

Sheats, James R., and Bruce W. Smith. Microlithography: Science and Technology. New York: Marcel Dekker, 1998.

MLA Edition Citation

Sheats, James R., and Bruce W. Smith. Microlithography: Science and Technology. Marcel Dekker, 1998.

Warning: These citations may not always be 100% accurate.