(2004). Enabling technology for MEMS and nanodevices. Wiley-VCH verlag.
Chicago Edition CitationEnabling Technology for MEMS and Nanodevices. weinheim: Wiley-VCH verlag, 2004.
MLA Edition CitationEnabling Technology for MEMS and Nanodevices. Wiley-VCH verlag, 2004.
Warning: These citations may not always be 100% accurate.