Modeling and control for micro/nano devices and systems /

Eitemau Tebyg

• Nano and micro electomechanical systems: fundamentals of nano and microengineering
  gan: Lyshevski, Sergey Edward
  Cyhoeddwyd: (2005)
• Nanoscale device physics : science and engineering fundamentals /
  gan: Tiwari, Sandip
• Photonic MEMS devices design,fabrication and control
  gan: Liu, Ai-Qun...[et.al]
  Cyhoeddwyd: (2009)
• Fundamentals of microfabrication and nanotechnology /
  gan: Madou, Marc J.
  Cyhoeddwyd: (2012)
• Modeling MEMS and NEMS
  gan: Pelesko, John A.
  Cyhoeddwyd: (2007)