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Modeling and control for micro/nano devices and systems /

Xehetasun bibliografikoak
Beste egile batzuk:	Xi, Ning, Zhang, Mingjun, Li, Guangyong
Formatua:	Printed Book
Argitaratua:	Boca Raton : CRC Press, c2014.
Saila:	Automation and control engineering
Gaiak:	Microelectromechanical systems. Nanoelectromechanical systems. Systems biology. Technology.

Antzeko izenburuak

Nano and micro electomechanical systems: fundamentals of nano and microengineering
nork: Lyshevski, Sergey Edward
Argitaratua: (2005)

Nanoscale device physics : science and engineering fundamentals /
nork: Tiwari, Sandip

Photonic MEMS devices design,fabrication and control
nork: Liu, Ai-Qun...[et.al]
Argitaratua: (2009)

Fundamentals of microfabrication and nanotechnology /
nork: Madou, Marc J.
Argitaratua: (2012)

Modeling MEMS and NEMS
nork: Pelesko, John A.
Argitaratua: (2007)

Photonic MEMS devices : design, fabrication and control /
nork: Liu, Ai-Qun
Argitaratua: (2009)

Reliability of MEMS:testing of materials and devices
nork: Tabata,Osamu
Argitaratua: (2008)

Handbook of nanophysics.
Argitaratua: (2011)

Reliability of MEMS /
Argitaratua: (2008)

Micromachines as tools for nanotechnology
nork: Fujita, H
Argitaratua: (2004)

Nanodevices for the life sciences
nork: S. S. R. Kumar
Argitaratua: (2011)

Principles and applications of NanoMEMS physics
nork: Dogra, H. R.
Argitaratua: (2008)

Modeling MEMS and NEMS /
nork: Pelesko,John A.
Argitaratua: (2003)

Fundamentals of microfabrication and nanotechnology: from MEMS to Bio-MEMS and Bio-NEMS-manufacturing techniques and applications/
nork: Madou, Marc J.
Argitaratua: (2012)

Microsystems and nanotechnology /
Argitaratua: (2012)

LIGA and its applications
nork: Saile,Volker ...[et.al]
Argitaratua: (2009)

Advances in multiphysics simulation and experimental testing of Mems
nork: Frangi, Attilio
Argitaratua: (2008)

Micro electro mechanical system design /
nork: Allen, James J.
Argitaratua: (2005)

Micro electro mechanical system design /
nork: Allen, James J.
Argitaratua: (2005)

VLSI micro- and nanophotonics : science, technology, and applications /
Argitaratua: (2010)

Nanofluidics : nanoscience and nanotechnology /
Argitaratua: (2009)

Nanosystems design and technology /
Argitaratua: (2009)

Nanofluidics : nanoscience and nanotechnology /
Argitaratua: (2009)

Advanced MEMS packaging/
nork: Lau, John H.
Argitaratua: (2010)

MEMS and MOEMS technology and applications /
Argitaratua: (2009)

Electromechanics and MEMS
nork: Jones, Thomas B
Argitaratua: (2013)

Advanced RF MEMS /
nork: Lucyszyn, S.
Argitaratua: (2010)

Integrated microsystems : electronics, photonics, and biotechnology /
Argitaratua: (2012)

Principles and applications of NanoMEMS physics /
nork: Santos, Héctor J. de los
Argitaratua: (2005)

Principles and applications of NanoMEMS physics /
nork: Santos, Hector J. de los
Argitaratua: (2005)

nano-micro interface: bridging the micro and nano worlds
nork: Fecht, Hans-Jorg
Argitaratua: (2004)

Nanoelectromechanics in engineering and biology /
nork: Hughes, Michael Pycraft
Argitaratua: (2003)

Principles of microelectromechanical systems
nork: Lee, Ki Bang
Argitaratua: (2011)

Inertial MEMS: principles and practice
nork: Kempe, Volker; Author
Argitaratua: (2011)

Scaling issues and design of MEMS
nork: Baglio, Salvatore
Argitaratua: (2007)

MEMS and microsystems : design, manufacture, and nanoscale engineering /
nork: Hsu, Tai-Ran
Argitaratua: (2008)

Microsensor, MEMS and smart devices
nork: Gardner, Julian W.
Argitaratua: (2007)

Nanotechnology for microelectronics and optoelectronics
nork: Martinez-Duart, J.M
Argitaratua: (2006)

BioNanoFluidic MEMS /
Argitaratua: (2008)

Inertial MEMS principles and practice
nork: Kempe, Volker
Argitaratua: (2011)