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Principles and applications of NanoMEMS physics /
| Egile nagusia: | |
|---|---|
| Formatua: | Printed Book |
| Argitaratua: |
Dordrecht, The Netherlands :
Springer,
c2005.
|
| Saila: | Microsystems ;
|
| Gaiak: | |
| Sarrera elektronikoa: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |
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