Chargement en cours...
Principles and applications of NanoMEMS physics /
| Auteur principal: | |
|---|---|
| Format: | Printed Book |
| Publié: |
Dordrecht, The Netherlands :
Springer,
c2005.
|
| Collection: | Microsystems ;
|
| Sujets: | |
| Accès en ligne: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |