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100 1 |a Santos, Héctor J. de los. 
245 1 0 |a Principles and applications of NanoMEMS physics /  |c by Héctor J. De Los Santos. 
260 |a Dordrecht, The Netherlands :  |b Springer,  |c c2005. 
300 |a xv, 254 p. :  |b ill. ; 
490 1 |a Microsystems ; 
504 |a Includes bibliographical references (p. [241]-252) and index. 
505 0 |a Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics. 
650 0 |a Quantum electronics. 
650 0 |a Wave-particle duality. 
650 0 |a Nanotechnology. 
650 0 |a Microelectromechanical systems. 
856 4 1 |u http://www.loc.gov/catdir/toc/ecip0513/2005015829.html 
856 4 2 |u http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html 
856 4 2 |u http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html 
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