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Principles and applications of NanoMEMS physics /
| मुख्य लेखक: | |
|---|---|
| स्वरूप: | Printed Book |
| प्रकाशित: |
Dordrecht, The Netherlands :
Springer,
c2005.
|
| श्रृंखला: | Microsystems ;
|
| विषय: | |
| ऑनलाइन पहुंच: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |
| भौतिक वर्णन: | xv, 254 p. : ill. ; |
|---|---|
| ग्रन्थसूची: | Includes bibliographical references (p. [241]-252) and index. |
| आईएसबीएन: | 1402032382 |