Principles and applications of NanoMEMS physics /

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Bibliographic Details
Main Author: Santos, Héctor J. de los
Format: Printed Book
Published: Dordrecht, The Netherlands : Springer, c2005.
Series:Microsystems ;
Subjects:
Quantum electronics.
Wave-particle duality.
Nanotechnology.
Microelectromechanical systems.
Online Access:http://www.loc.gov/catdir/toc/ecip0513/2005015829.html
http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html
http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html
Description
Physical Description:xv, 254 p. : ill. ;
Bibliography:Includes bibliographical references (p. [241]-252) and index.
ISBN:1402032382

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