Zhou, Z., Wang, Z., & Lin, L. (2012). Microsystems and nanotechnology. Tsinghua University Press ; Springer.
Chicago Edition CitationZhou, Zhaoying, Zhonglin Wang, and Liwei Lin. Microsystems and Nanotechnology. Beijing : Berlin: Tsinghua University Press ; Springer, 2012.
MLA Edition CitationZhou, Zhaoying, et al. Microsystems and Nanotechnology. Tsinghua University Press ; Springer, 2012.
Warning: These citations may not always be 100% accurate.