Photonic microsystems : micro and nanotechnology applied to optical devices and systems /

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Bibliographische Detailangaben
1. Verfasser: Solgaard, Olav
Format: Printed Book
Schriftenreihe:MEMS reference shelf,
Schlagworte:
Microelectromechanical systems.
Photonics.
Optoelectronic devices
Optical communications.
Microsystèmes électromécaniques.
Nanophotonique.
Dispositifs optoélectroniques
Microtechnologie.
Nanotechnologie.
Nanophotonik.
MEMS.
Mikrooptik.

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