Lanean...
| LEADER | 00650nam a22001577a 4500 | ||
|---|---|---|---|
| 999 | |c 212972 |d 212972 | ||
| 020 | |a 9783642054297 | ||
| 082 | |a 621.38152 | ||
| 100 | |a | ||
| 245 | |a Handbook of thin film technology |c FREY, Hartmut; Khan, H. R,editor | ||
| 260 | |a Berlin |b Springer |c 2015 | ||
| 300 | |a xiii,379p. | ||
| 505 | |a vacuum technology for thin film coating--vacuum evaporation--plasma physics--cathode sputtering--particle beam source--chemical vapor deposition--nanoparticle films | ||
| 650 | |a thin film | ||
| 942 | |c BK | ||
| 952 | |0 0 |1 0 |4 0 |6 621_381520000000000_FRE_H |7 0 |9 226604 |a DOP |b DOP |d 2019-11-19 |l 0 |o 621.38152 FRE/H |p DOP2954 |r 2019-11-19 |w 2019-11-19 |y BK | ||