Gatzen,Hans H,Saile,Volker and Leuthold,Jurg. (2015). Micro and nano fabrication: Tools and processes with a forward and introduction by Richard S. Muller. Springer-Verlag,Berlin.
Chicago Edition CitationGatzen,Hans H,Saile,Volker and Leuthold,Jurg. Micro and Nano Fabrication: Tools and Processes with a Forward and Introduction by Richard S. Muller. Springer-Verlag,Berlin, 2015.
MLA Edition CitationGatzen,Hans H,Saile,Volker and Leuthold,Jurg. Micro and Nano Fabrication: Tools and Processes with a Forward and Introduction by Richard S. Muller. Springer-Verlag,Berlin, 2015.
Warning: These citations may not always be 100% accurate.