Feldman,Martin,Ed. (2014). Nanolithography: The art of fabricating nanoelectronic and nanophotonic devices and systems. Woodhead publihing ltd , Cambridge.
Chicago Edition CitationFeldman,Martin,Ed. Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems. Woodhead publihing ltd , Cambridge, 2014.
MLA Edition CitationFeldman,Martin,Ed. Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems. Woodhead publihing ltd , Cambridge, 2014.
Warning: These citations may not always be 100% accurate.