Bucknall,David G,Ed. (2005). Nanolithography and patterning techniques in microelectronics. Wood head publishing Ltd, Cambridge.
Chicago Edition CitationBucknall,David G,Ed. Nanolithography and Patterning Techniques in Microelectronics. Wood head publishing Ltd, Cambridge, 2005.
MLA Edition CitationBucknall,David G,Ed. Nanolithography and Patterning Techniques in Microelectronics. Wood head publishing Ltd, Cambridge, 2005.
Warning: These citations may not always be 100% accurate.