Madou,MarcJ. (2012). Fundamentals of Microfabrication and nanotechnology: Solid-state physics,fluidics, and analytical techniques in micro and nanotechnology, Volume1 (3 Edition.). CRC Press.
Chicago Edition CitationMadou,MarcJ. Fundamentals of Microfabrication and Nanotechnology: Solid-state Physics,fluidics, and Analytical Techniques in Micro and Nanotechnology, Volume1. 3 Edition. CRC Press, 2012.
MLA Edition CitationMadou,MarcJ. Fundamentals of Microfabrication and Nanotechnology: Solid-state Physics,fluidics, and Analytical Techniques in Micro and Nanotechnology, Volume1. 3 Edition. CRC Press, 2012.
Warning: These citations may not always be 100% accurate.