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Material science in micro electronics: the relationships between thin film processor and structure volume1
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| Format: | Printed Book |
| Published: |
Elsevier, Amsterdam
2005
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| LEADER | 00530nam a2200145 4500 | ||
|---|---|---|---|
| 020 | |c 10065.0 | ||
| 082 | |a R 620.144 MAC/M.1 | ||
| 100 | |a Machlin,ES | ||
| 245 | |a Material science in micro electronics: the relationships between thin film processor and structure volume1 | ||
| 250 | |||
| 260 | |b Elsevier, Amsterdam |c 2005 | ||
| 590 | |a Southern Books | ||
| 942 | |c REF | ||
| 999 | |c 184831 |d 184831 | ||
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