Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.
Chicago Edition CitationCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.
MLA引文Campbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.
警告:这些引文格式不一定是100%准确.