Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.
Chicago-stil citatCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.
MLA-referensCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.
Varning: dessa hänvisningar är inte alltid fullständigt riktiga.