Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.
Chicago Style citaatCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.
MLA citatieCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.
Let op: Deze citaties zijn niet altijd 100% accuraat.