Campbell, S. A. (1996). Science and engineering of microelectronic abrication. OUP.
शिकागो स्टाइल उद्धरणCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. New York: OUP, 1996.
एमएलए उद्धरणCampbell, Stephen A. Science and Engineering of Microelectronic Abrication. OUP, 1996.
चेतावनी: ये उद्धरण हमेशा 100% सटीक नहीं हो सकते हैं.